Nanoscale manipulation of materials patterning through thermomechanical nanolithography using atomic force microscopy
We conducted thermomechanical nanolithography to realize nanoscale manipulation of materials patterning on a polymethyl methacrylate thin film. We used atomic force microscopy with a heated tip make a single scratch on the film surface. The error in the machining force caused by the thermal expansio...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-04-01
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| Series: | Materials & Design |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127521001003 |