Nanoscale manipulation of materials patterning through thermomechanical nanolithography using atomic force microscopy
We conducted thermomechanical nanolithography to realize nanoscale manipulation of materials patterning on a polymethyl methacrylate thin film. We used atomic force microscopy with a heated tip make a single scratch on the film surface. The error in the machining force caused by the thermal expansio...
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doaj-57462b71d7f347d3adaba165b6ac70ed2021-03-11T04:23:10ZengElsevierMaterials & Design0264-12752021-04-01202109547Nanoscale manipulation of materials patterning through thermomechanical nanolithography using atomic force microscopyShunyu Chang0Yongda Yan1Bo Li2Yanquan Geng3The State Key Laboratory of Robotics and Systems, Robotics Institute, Harbin Institute of Technology, Harbin, Heilongjiang 150080, PR China; Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, PR ChinaThe State Key Laboratory of Robotics and Systems, Robotics Institute, Harbin Institute of Technology, Harbin, Heilongjiang 150080, PR China; Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, PR ChinaThe State Key Laboratory of Robotics and Systems, Robotics Institute, Harbin Institute of Technology, Harbin, Heilongjiang 150080, PR China; Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, PR ChinaThe State Key Laboratory of Robotics and Systems, Robotics Institute, Harbin Institute of Technology, Harbin, Heilongjiang 150080, PR China; Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, PR China; Corresponding author at: The State Key Laboratory of Robotics and Systems, Robotics Institute, Harbin Institute of Technology, Harbin, Heilongjiang 150080, PR China.We conducted thermomechanical nanolithography to realize nanoscale manipulation of materials patterning on a polymethyl methacrylate thin film. We used atomic force microscopy with a heated tip make a single scratch on the film surface. The error in the machining force caused by the thermal expansion of the tip cantilever was corrected to guarantee the accuracy of machining force by calibrating the machining parameters, including the spring constant of the tip cantilever and the sensitivity coefficient of the optical lever for different tip temperatures. Three kinds of nanostructure including polymer nanowires, nanopit arrays, and nanogrooves were regulated via controlling scratching velocity and the heated temperature. Inspection of the nanopit arrays proved that fabrication of continuous bundles with desired dimensions can be realized by controlling the feed between adjacent scratching paths. The good agreement between the calculated stick–slip friction and observed machining outcomes demonstrated the feasibility of using stick–slip friction to predict the generation of nanopit structures.http://www.sciencedirect.com/science/article/pii/S0264127521001003Atomic force microscopyThermomechanical nanolithographyNanoscale manipulationPolymer thin filmNanostructure |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Shunyu Chang Yongda Yan Bo Li Yanquan Geng |
spellingShingle |
Shunyu Chang Yongda Yan Bo Li Yanquan Geng Nanoscale manipulation of materials patterning through thermomechanical nanolithography using atomic force microscopy Materials & Design Atomic force microscopy Thermomechanical nanolithography Nanoscale manipulation Polymer thin film Nanostructure |
author_facet |
Shunyu Chang Yongda Yan Bo Li Yanquan Geng |
author_sort |
Shunyu Chang |
title |
Nanoscale manipulation of materials patterning through thermomechanical nanolithography using atomic force microscopy |
title_short |
Nanoscale manipulation of materials patterning through thermomechanical nanolithography using atomic force microscopy |
title_full |
Nanoscale manipulation of materials patterning through thermomechanical nanolithography using atomic force microscopy |
title_fullStr |
Nanoscale manipulation of materials patterning through thermomechanical nanolithography using atomic force microscopy |
title_full_unstemmed |
Nanoscale manipulation of materials patterning through thermomechanical nanolithography using atomic force microscopy |
title_sort |
nanoscale manipulation of materials patterning through thermomechanical nanolithography using atomic force microscopy |
publisher |
Elsevier |
series |
Materials & Design |
issn |
0264-1275 |
publishDate |
2021-04-01 |
description |
We conducted thermomechanical nanolithography to realize nanoscale manipulation of materials patterning on a polymethyl methacrylate thin film. We used atomic force microscopy with a heated tip make a single scratch on the film surface. The error in the machining force caused by the thermal expansion of the tip cantilever was corrected to guarantee the accuracy of machining force by calibrating the machining parameters, including the spring constant of the tip cantilever and the sensitivity coefficient of the optical lever for different tip temperatures. Three kinds of nanostructure including polymer nanowires, nanopit arrays, and nanogrooves were regulated via controlling scratching velocity and the heated temperature. Inspection of the nanopit arrays proved that fabrication of continuous bundles with desired dimensions can be realized by controlling the feed between adjacent scratching paths. The good agreement between the calculated stick–slip friction and observed machining outcomes demonstrated the feasibility of using stick–slip friction to predict the generation of nanopit structures. |
topic |
Atomic force microscopy Thermomechanical nanolithography Nanoscale manipulation Polymer thin film Nanostructure |
url |
http://www.sciencedirect.com/science/article/pii/S0264127521001003 |
work_keys_str_mv |
AT shunyuchang nanoscalemanipulationofmaterialspatterningthroughthermomechanicalnanolithographyusingatomicforcemicroscopy AT yongdayan nanoscalemanipulationofmaterialspatterningthroughthermomechanicalnanolithographyusingatomicforcemicroscopy AT boli nanoscalemanipulationofmaterialspatterningthroughthermomechanicalnanolithographyusingatomicforcemicroscopy AT yanquangeng nanoscalemanipulationofmaterialspatterningthroughthermomechanicalnanolithographyusingatomicforcemicroscopy |
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1724226117874745344 |