Nanoscale manipulation of materials patterning through thermomechanical nanolithography using atomic force microscopy
We conducted thermomechanical nanolithography to realize nanoscale manipulation of materials patterning on a polymethyl methacrylate thin film. We used atomic force microscopy with a heated tip make a single scratch on the film surface. The error in the machining force caused by the thermal expansio...
Main Authors: | Shunyu Chang, Yongda Yan, Bo Li, Yanquan Geng |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2021-04-01
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Series: | Materials & Design |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127521001003 |
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