IN-LINE SPUTTERING COATER OF HYDROPHOBIC ANTIREFLECTION COATING FOR SENSOR DISPLAYS
The aim of the work is to develop vacuum technological equipment for deposition an interference antireflection coating with the evaporation of a hydrophobic protective layer in a single vacuum cycle. To deposition an interference antireflection coating, the method of magnetron reactive sputtering in...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-12-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/2108 |