Direct-write polymer nanolithography in ultra-high vacuum

Polymer nanostructures were directly written onto substrates in ultra-high vacuum. The polymer ink was coated onto atomic force microscope (AFM) probes that could be heated to control the ink viscosity. Then, the ink-coated probes were placed into an ultra-high vacuum (UHV) AFM and used to write pol...

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Bibliographic Details
Main Authors: Woo-Kyung Lee, Minchul Yang, Arnaldo R. Laracuente, William P. King, Lloyd J. Whitman, Paul E. Sheehan
Format: Article
Language:English
Published: Beilstein-Institut 2012-01-01
Series:Beilstein Journal of Nanotechnology
Subjects:
Online Access:https://doi.org/10.3762/bjnano.3.6