Effects of Thermal Annealing on the Properties of Zirconium-Doped Mg<sub>x</sub>Zn<sub>1−X</sub>O Films Obtained through Radio-Frequency Magnetron Sputtering

Zirconium-doped Mg<sub>x</sub>Zn<sub>1−x</sub>O (Zr-doped MZO) mixed-oxide films were investigated, and the temperature sensitivity of their electric and optical properties was characterized. Zr-doped MZO films were deposited through radio-frequency magnetron sputtering using...

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Bibliographic Details
Main Authors: Wen-Yen Lin, Feng-Tsun Chien, Hsien-Chin Chiu, Jinn-Kong Sheu, Kuang-Po Hsueh
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Membranes
Subjects:
ZnO
MgO
Online Access:https://www.mdpi.com/2077-0375/11/5/373