Development of Highly Sensitive Temperature Microsensors for Localized Measurements
This paper presents the design, fabrication and characterization of temperature microsensors based on Resistance Temperature Detectors (RTDs) with a meander-shaped geometry. Numerical simulations were performed for studying the sensitivity of the RTDs according to their windings numbers as well as f...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-04-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/9/3864 |