Advances in High-Resolution Microscale Impedance Sensors
Sensors based on impedance transduction have been well consolidated in the industry for decades. Today, the downscaling of the size of sensing elements to micrometric and submicrometric dimensions is enabled by the diffusion of lithographic processes and fostered by the convergence of complementary...
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| Format: | Article |
| Language: | English |
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Hindawi Limited
2017-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2017/7638389 |