Finite element analysis of surface elastic waveguide based on pyramidal phononic crystal
Abstract In this paper, a pyramidal phononic crystal waveguide, deposited on a thick substrate made of silicon, is studied. The pillars are arranged in a square array on the top surface of the substrate. By using the finite element method, the surface modes are investigated, and the band structures...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2021-01-01
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| Series: | Micro & Nano Letters |
| Online Access: | https://doi.org/10.1049/mna2.12000 |