Femtosecond Laser Processing of Membranes for Sensor Devices on different Bulk Materials
We demonstrate that diaphragms for sensor applications can be fabricated by laser ablation in a~variety of substrates such as ceramics, glass, sapphire or SiC. However, ablation can cause pinholes in membranes made of SiC, Si and metals. Our experiments indicate that pinhole defects in the ablated m...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
VSB-Technical University of Ostrava
2017-01-01
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| Series: | Advances in Electrical and Electronic Engineering |
| Subjects: | |
| Online Access: | http://advances.utc.sk/index.php/AEEE/article/view/2033 |