Study on defects detection technique of precise optical element
Aiming at the problems of low efficiency of traditional detection methods for surface defects of precision optical element and inconvenient detection for optical elements of different calibers, a adjustable optical element defects detecting device for large laser devices is designed. The key technic...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2018-01-01
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| Series: | E3S Web of Conferences |
| Online Access: | https://doi.org/10.1051/e3sconf/20185301037 |