Molecular dynamics investigation of material deformation behavior of PMMA in nanoimprint lithography
Computational analysis of polymeric materials plays a key role in defining their tribological characteristics. This research investigates the deformation behavior of poly(methylmethacrylate) (PMMA) as a thermoplastic resist material for the thermal nanoimprint lithography (T-NIL) process. Molecular...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-09-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0014458 |