Measure transparent elements using least squares iterative phase shift method

In order to measure the surface phase of the front and back of the transparent plate more accurately, a phase shift algorithm based on least squares iteration is proposed. After a least squares phase shift algorithm, the corresponding transparent flat surface pattern can be obtained, but the accurac...

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Bibliographic Details
Main Authors: Li Jingwei, Xin Qing, Yu Jie, Hou Changlun
Format: Article
Language:zho
Published: National Computer System Engineering Research Institute of China 2021-01-01
Series:Dianzi Jishu Yingyong
Subjects:
Online Access:http://www.chinaaet.com/article/3000128427