Fatigue Life Analysis of Cantilever Probe on Wafer Test
This research utilizes the finite element analysis software (ANSYS) to stimulate the different probe material quality (tungsten, SUS304 stainless steel, SUS316L stainless steel and SKD11 tool steel, respectively) during wafer tests. Under a room temperature of (25°C), the stress and fatigue life (cy...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2016-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20167104007 |