First-sharp diffraction peaks in amorphous GeTe and Ge2Sb2Te5 films prepared by vacuum-thermal deposition

We report on a presence of intermediate-range order in amorphous GeTe and Ge2Sb2Te5 phase change films prepared by simple vacuum-thermal deposition. We find that thermally deposited GeTe and Ge2Sb2Te5 films show significant first sharp diffraction peaks (FSDPs) in the X-ray diffraction pattern, alth...

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Bibliographic Details
Main Authors: Toshihiro Nakaoka, Hiroki Satoh, Saori Honjo, Hideo Takeuchi
Format: Article
Language:English
Published: AIP Publishing LLC 2012-12-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4773329