Micro Motion Amplifiers for Compact Out-of-Plane Actuation

Micro Motion Amplifiers for Compact Out-of-Plane Actuation

Small-scale, out-of-plane actuators can enable tactile interfaces; however, achieving sufficient actuator force and displacement can require larger actuators. In this work, 2-mm2 out-of-plane microactuators were created, and were demonstrated to output up to 6.3 µm of displacement and 16 m...

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Bibliographic Details
Main Authors: Xin Xie, Majid Bigdeli Karimi, Sanwei Liu, Battushig Myanganbayar, Carol Livermore
Format: Article
Language:English
Published: MDPI AG 2018-07-01
Series:Micromachines
Subjects:
microactuators
tactile actuators
piezoelectric actuators
scissor mechanism
motion amplifier
out-of-plane actuator
Online Access:http://www.mdpi.com/2072-666X/9/7/365

Internet

http://www.mdpi.com/2072-666X/9/7/365

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