Thermal Conductivity of Nano-Crystallized Indium-Gallium-Zinc Oxide Thin Films Determined by Differential Three-Omega Method

Thermal Conductivity of Nano-Crystallized Indium-Gallium-Zinc Oxide Thin Films Determined by Differential Three-Omega Method

The temperature dependence thermal conductivity of the indium-gallium-zinc oxide (IGZO) thin films was investigated with the differential three-omega method for the clear demonstration of nanocrystallinity. The thin films were deposited on an alumina (α-Al<sub>2</sub>O<sub>3</su...

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Bibliographic Details
Main Authors: Rauf Khan, Michitaka Ohtaki, Satoshi Hata, Koji Miyazaki, Reiji Hattori
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Nanomaterials
Subjects:
IGZO thin film
three-omega method
thermal conductivity
nano crystallinity
transmission electron microscopy
Online Access:https://www.mdpi.com/2079-4991/11/6/1547

Internet

https://www.mdpi.com/2079-4991/11/6/1547

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