The Optical Properties of InGaN/GaN Nanorods Fabricated on (-201) β-Ga<sub>2</sub>O<sub>3</sub> Substrate for Vertical Light Emitting Diodes
We fabricated InGaN/GaN nanorod light emitting diode (LED) on (-201) β-Ga<sub>2</sub>O<sub>3</sub> substrate via the SiO<sub>2</sub> nanosphere lithography and dry-etching techniques. The InGaN/GaN nanorod LED grown on β-Ga<sub>2</sub>O<sub>3<...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-02-01
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Series: | Photonics |
Subjects: | |
Online Access: | https://www.mdpi.com/2304-6732/8/2/42 |