PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning

PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning

This article presents design, fabrication and characterization of lead zirconate titanate (PZT)-actuated micromirrors, which enable extremely large scan angle of up to 106° and high frequency of 45 kHz simultaneously. Besides the high driving torque delivered by PZT actuators, mechanical leverage am...

Full description

Bibliographic Details
Main Authors: Shanshan Gu-Stoppel, Thorsten Giese, Hans-Joachim Quenzer, Ulrich Hofmann, Wolfgang Benecke
Format: Article
Language:English
Published: MDPI AG 2017-07-01
Series:Micromachines
Subjects:
micromirror
PZT
piezoelectric
position sensors
biaxial scanning
Online Access:https://www.mdpi.com/2072-666X/8/7/215

Internet

https://www.mdpi.com/2072-666X/8/7/215

Similar Items