Large Out-of-Plane Deflection MEMS Actuators for Optical Applications
The design and fabrication of an electrothermal MEMS actuation structure which is capable of producing large out-of-plane deflection is presented. The actuators are used to move a 1 mm<sup>2</sup> mirror structure, where the large deflection allows one to achieve large beam steering angl...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-11-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/1072 |