Development of a fully automated desktop chemical vapor deposition system for programmable and controlled carbon nanotube growth

Development of a fully automated desktop chemical vapor deposition system for programmable and controlled carbon nanotube growth

Abstract We have rationally designed and developed a fully automated desktop furnace system that enables programmable chemical vapour deposition growth of carbon nanotubes with controlled height, density, and pattern architecture. Comprising several essential components involving a heating furnace,...

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Bibliographic Details
Main Authors: Ju Hyun Ahn, Minho Na, Sungkwan Koo, Hyunsoo Chun, Inhwan Kim, Jong Won Hur, Jae Hyuk Lee, Jong G. Ok
Format: Article
Language:English
Published: SpringerOpen 2019-08-01
Series:Micro and Nano Systems Letters
Subjects:
Carbon nanotube
Chemical vapor deposition
Furnace
Desktop system
Programmable growth recipe
Automated control
Online Access:http://link.springer.com/article/10.1186/s40486-019-0091-8

Internet

http://link.springer.com/article/10.1186/s40486-019-0091-8

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