Effects of thickness ratios and sputtering mode on the structural, electrical and optical properties of bilayer molybdenum thin films
In this paper, the bilayer Mo films with a constant thickness were deposited by direct current and direct current (DC/DC), radio frequency and direct current mixed (RF/DC) magnetron sputtering, respectively. Changing thickness ratios of bottom layer to total thickness of bilayer film in the range fr...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-09-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5043437 |