Nebula: Monte Carlo simulator of electron–matter interaction

Monte Carlo simulations are frequently used to describe electron–matter interaction in the 0–50 keV energy range. It often takes hours to simulate electron microscope images using first-principle physical models. In an attempt to maintain a reasonable speed, empirical models are sometimes used.We pr...

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Bibliographic Details
Main Authors: L. van Kessel, C.W. Hagen
Format: Article
Language:English
Published: Elsevier 2020-07-01
Series:SoftwareX
Subjects:
GPU
SEM
Online Access:http://www.sciencedirect.com/science/article/pii/S2352711020303186