Optoelectronic Properties of Ti-doped SnO<sub>2</sub> Thin Films Processed Under Different Annealing Temperatures

Ti-doped SnO<sub>2</sub> transparent conductive oxide (TCO) thin films are deposited on glass substrates using a radio frequency (RF) magnetron sputtering system and then are annealed at temperatures in the range of 200–500 °C for 30 min. The effects of the annealing temperature on the s...

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Bibliographic Details
Main Authors: Chi-Fan Liu, Chun-Hsien Kuo, Tao-Hsing Chen, Yu-Sheng Huang
Format: Article
Language:English
Published: MDPI AG 2020-04-01
Series:Coatings
Subjects:
Online Access:https://www.mdpi.com/2079-6412/10/4/394