Nanomechanical humidity detection through porous alumina cantilevers

Nanomechanical humidity detection through porous alumina cantilevers

We present here the behavior of the resonance frequency of porous anodic alumina cantilever arrays during water vapor adsorption and emphasize their possible use in the micromechanical sensing of humidity levels at least in the range of 10–22%. The sensitivity of porous anodic aluminium oxide cantil...

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Bibliographic Details
Main Authors: Olga Boytsova, Alexey Klimenko, Vasiliy Lebedev, Alexey Lukashin, Andrey Eliseev
Format: Article
Language:English
Published: Beilstein-Institut 2015-06-01
Series:Beilstein Journal of Nanotechnology
Subjects:
anodic aluminium oxide
atomic force microscopy (AFM)
cantilever arrays
humidity
mechanical sensor
porous alumina
Online Access:https://doi.org/10.3762/bjnano.6.137

Internet

https://doi.org/10.3762/bjnano.6.137

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