PULSED LASER DEPOSITION OF ALUMINUM NITRIDE THIN FILMS ONTO SAPPHIRE SUBSTRATES
Subject of Research.The paper presents experimental study results of surface morphology and structural and optical properties of sapphire AlN films obtained by pulsed laser spraying. Method. Thin AlN films on sapphire were used as experimental samples. The preparation of AlN films was carried out us...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Saint Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University)
2020-04-01
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| Series: | Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki |
| Subjects: | |
| Online Access: | https://ntv.ifmo.ru/file/article/19517.pdf |