Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators

Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators

This paper presents resonant pressure micro sensors based on dual double ended tuning fork (DETF) resonators, which are electrostatically excited and piezoresistively detected. In operation, the barometric pressure under measurement bends the pressure sensitive diaphragm functioning as the anchor of...

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Bibliographic Details
Main Authors: Yulan Lu, Sen Zhang, Pengcheng Yan, Yadong Li, Jie Yu, Deyong Chen, Junbo Wang, Bo Xie, Jian Chen
Format: Article
Language:English
Published: MDPI AG 2019-08-01
Series:Micromachines
Subjects:
resonant pressure micro sensor
double ended tuning fork resonator electrostatic excitation
piezoresistive detection
Online Access:https://www.mdpi.com/2072-666X/10/9/560

Internet

https://www.mdpi.com/2072-666X/10/9/560

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