An Electric Field Microsensor with Mutual Shielding Electrodes

An Electric Field Microsensor with Mutual Shielding Electrodes

This paper proposes an electric field microsensor (EFM) with mutual shielding electrodes. Based on the charge-induction principle, the EFM consists of fixed electrodes and piezoelectric-driving vertically-movable electrodes. All the fixed electrodes and movable electrodes work as both sensing electr...

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Bibliographic Details
Main Authors: Hucheng Lei, Shanhong Xia, Zhaozhi Chu, Biyun Ling, Chunrong Peng, Zhouwei Zhang, Jun Liu, Wei Zhang
Format: Article
Language:English
Published: MDPI AG 2021-03-01
Series:Micromachines
Subjects:
electric field microsensor
mutual shielding electrodes
piezoelectric driven
Online Access:https://www.mdpi.com/2072-666X/12/4/360

Internet

https://www.mdpi.com/2072-666X/12/4/360

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