Flexible Membrane Micro Flow-rate Threshold Flow Sensor
A piezoresistive flow sensor that functions as a threshold flow switch, independent of input supply voltage, is designed, fabricated, and tested. The test flow rate is in the 10s ml/hr range. The sensor is fabricated using doped hydrogenated amorphous silicon thin film with MEMs on flexible polyimid...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2007-12-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/december_07/P_220.pdf |