Dynamics of Nonlinear Coupled Electrostatic Micromechanical Resonators under Two-Frequency Parametric and External Excitations
In this paper, nonlinear dynamics and chaos of electrostatically actuated MEMS resonators under two-frequency parametric and external excitations are investigated analytically and numerically. A nonlinear mass-spring-damping model is used to accounting for squeeze film damping and the parallel plate...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2010-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.3233/SAV-2010-0519 |