Dynamics of Nonlinear Coupled Electrostatic Micromechanical Resonators under Two-Frequency Parametric and External Excitations

In this paper, nonlinear dynamics and chaos of electrostatically actuated MEMS resonators under two-frequency parametric and external excitations are investigated analytically and numerically. A nonlinear mass-spring-damping model is used to accounting for squeeze film damping and the parallel plate...

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Bibliographic Details
Main Authors: Wen-Ming Zhang, Guang Meng, Ke-Xiang Wei
Format: Article
Language:English
Published: Hindawi Limited 2010-01-01
Series:Shock and Vibration
Online Access:http://dx.doi.org/10.3233/SAV-2010-0519