Raman Spectroscopy-Based Quality Control of “Silicon-On-Insulator” Nanowire Chips for the Detection of Brain Cancer-Associated MicroRNA in Plasma

Application of micro-Raman spectroscopy for the monitoring of quality of nanowire sensor chips fabrication has been demonstrated. Nanowire chips have been fabricated on the basis of «silicon-on-insulator» (SOI) structures (SOI-NW chips). The fabrication of SOI-NW chips was performed by optical litog...

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Bibliographic Details
Main Authors: Kristina A. Malsagova, Vladimir P. Popov, Igor N. Kupriyanov, Tatyana O. Pleshakova, Rafael A. Galiullin, Andrey F. Kozlov, Ivan D. Shumov, Dmitry I. Larionov, Fedor V. Tikhonenko, Svetlana I. Kapustina, Vadim S. Ziborov, Oleg F. Petrov, Olga A. Gadzhieva, Boris A. Bashiryan, Vadim N. Shimansky, Alexander I. Archakov, Yuri D. Ivanov
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/21/4/1333