Pull-In Analysis of the Flat Circular CMUT Cell Featuring Sealed Cavity
Capacitive micromachined ultrasonic transducers (CMUTs) are one of the appealing MEMS devices. Most studies treat CMUTs as rigid plates vibrating in open air, ignoring the mechanical boundary conditions for simplification and resulting in cumulative errors in coupled fields. This paper presents a ne...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2015-01-01
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| Series: | Mathematical Problems in Engineering |
| Online Access: | http://dx.doi.org/10.1155/2015/150279 |