Extension of the probe-tip error evaluation for areal surface roughness measurements using metrological AFM
Recently, there have been increasing demands not only for the conventional profile surface roughness measurements using atomic force microscopes (AFM) but also for areal surface roughness measurements. In this study, a technique using Sal, one of the areal surface roughness parameters, instead of RS...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421000556 |