Critical Parameters and Influence on Dynamic Behaviours of Nonlinear Electrostatic Force in a Micromechanical Vibrating Gyroscope
The electrostatic force nonlinearity caused by fringe effects of the microscale comb will affect the dynamic performance of the micromechanical vibrating gyroscopes (MVGs). In order to reveal the influence mechanism, a class of four-degree-of-freedom (4-DOF) electrostatically driven MVG is considere...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2020-01-01
|
| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2020/8880124 |