On-chip detection performed by amorphous silicon balanced photosensor for lab-on chip application

In this paper we have integrated a two-channel microfluidic network, fabricated by molding two polydimethilsiloxane channels, with a balanced photodiode constituted by two series-connected amorphous silicon/silicon carbide n-i-p stacked junctions, deposited by Plasma Enhanced Chemical Vapor Depositi...

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Bibliographic Details
Main Authors: G. de Cesare, A. Nascetti, R. Scipinotti, A. Zahra, D. Caputo
Format: Article
Language:English
Published: Elsevier 2015-03-01
Series:Sensing and Bio-Sensing Research
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2214180414000464