A Novel Bi-Stable MEMS Membrane Concept Based on a Piezoelectric Thin Film Actuator for Integrated Switching
This study reports on a novel bi-stable actuator with an integrated aluminum nitride (AlN) piezoelectric layer sandwiched between two electrodes. To achieve bistability, the membranes must exceed a characteristic compressive stress value, also called the critical stress. For this purpose, we used hi...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-01-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2504-3900/2/13/912 |