Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect

Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect

In this paper, a stiffness match method is proposed to reduce the vibration sensitivity of micromachined tuning fork gyroscopes. Taking advantage of the coordinate transformation method, a theoretical model is established to analyze the anti-phase vibration output caused by the stiffness mismatch du...

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Bibliographic Details
Main Authors: Yanwei Guan, Shiqiao Gao, Haipeng Liu, Lei Jin, Yaping Zhang
Format: Article
Language:English
Published: MDPI AG 2016-07-01
Series:Sensors
Subjects:
vibration sensitivity
micromachined tuning fork gyroscopes
coordinate transformation method
stiffness match method
negative electrostatic spring effect
Online Access:http://www.mdpi.com/1424-8220/16/7/1146

Internet

http://www.mdpi.com/1424-8220/16/7/1146

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