Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect
In this paper, a stiffness match method is proposed to reduce the vibration sensitivity of micromachined tuning fork gyroscopes. Taking advantage of the coordinate transformation method, a theoretical model is established to analyze the anti-phase vibration output caused by the stiffness mismatch du...
Main Authors: | Yanwei Guan, Shiqiao Gao, Haipeng Liu, Lei Jin, Yaping Zhang |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2016-07-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/16/7/1146 |
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