Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system
Flexure-based mechanisms have been widely used for scanning tunneling microscopy, nanoimprint lithography, fast servo tool system and micro/nano manipulation. In this paper, a novel planar micromanipulation stage with large rotational displacement is proposed. The designed monolithic manipulator...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2017-05-01
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| Series: | Mechanical Sciences |
| Online Access: | http://www.mech-sci.net/8/117/2017/ms-8-117-2017.pdf |