Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage
A multibody dynamic model is developed for dynamic analysis of a 5-DOF flexure-based nanopositioning stage in the projection optical system of the semiconductor lithography in this paper. The 5-DOF stage is considered as an assembly of rigid bodies interconnected by elastic flexure hinges. Consideri...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2019-01-01
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| Series: | Mathematical Problems in Engineering |
| Online Access: | http://dx.doi.org/10.1155/2019/8501583 |