Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage
A multibody dynamic model is developed for dynamic analysis of a 5-DOF flexure-based nanopositioning stage in the projection optical system of the semiconductor lithography in this paper. The 5-DOF stage is considered as an assembly of rigid bodies interconnected by elastic flexure hinges. Consideri...
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Series: | Mathematical Problems in Engineering |
Online Access: | http://dx.doi.org/10.1155/2019/8501583 |
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doaj-65217e68c20f4eb3b7c597c852ce75652020-11-25T01:01:45ZengHindawi LimitedMathematical Problems in Engineering1024-123X1563-51472019-01-01201910.1155/2019/85015838501583Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning StageYiping Shen0Xin Luo1Songlai Wang2Xuejun Li3Hunan Provincial Key Laboratory of Health Maintenance for Mechanical Equipment, Hunan University of Science and Technology, Xiangtan, Hunan 411201, ChinaState Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, Hubei 430074, ChinaHunan Provincial Key Laboratory of Health Maintenance for Mechanical Equipment, Hunan University of Science and Technology, Xiangtan, Hunan 411201, ChinaHunan Provincial Key Laboratory of Health Maintenance for Mechanical Equipment, Hunan University of Science and Technology, Xiangtan, Hunan 411201, ChinaA multibody dynamic model is developed for dynamic analysis of a 5-DOF flexure-based nanopositioning stage in the projection optical system of the semiconductor lithography in this paper. The 5-DOF stage is considered as an assembly of rigid bodies interconnected by elastic flexure hinges. Considering the length effects of flexure hinges, multibody dynamic equations are established according to spatial motions of rigid bodies by using Lagrangian method. The shear effects and the torsional compliances of the commonly used circular flexure hinges are considered to enhance the modeling accuracy. The accuracies of various out-of-plane compliance formulas are also discussed. To verify the developed dynamic model, the finite element analyses (FEA) by using ANSYS and modal hammer experimental tests of the primary flexure-based composition structures and the integral 5-DOF stage are performed. The analytical modal frequencies are well in agreement with FEA and experimental test. The results are significant to analyze and optimize the 5-DOF flexure-based nanopositioning stage.http://dx.doi.org/10.1155/2019/8501583 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Yiping Shen Xin Luo Songlai Wang Xuejun Li |
spellingShingle |
Yiping Shen Xin Luo Songlai Wang Xuejun Li Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage Mathematical Problems in Engineering |
author_facet |
Yiping Shen Xin Luo Songlai Wang Xuejun Li |
author_sort |
Yiping Shen |
title |
Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage |
title_short |
Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage |
title_full |
Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage |
title_fullStr |
Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage |
title_full_unstemmed |
Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage |
title_sort |
dynamic analysis of a 5-dof flexure-based nanopositioning stage |
publisher |
Hindawi Limited |
series |
Mathematical Problems in Engineering |
issn |
1024-123X 1563-5147 |
publishDate |
2019-01-01 |
description |
A multibody dynamic model is developed for dynamic analysis of a 5-DOF flexure-based nanopositioning stage in the projection optical system of the semiconductor lithography in this paper. The 5-DOF stage is considered as an assembly of rigid bodies interconnected by elastic flexure hinges. Considering the length effects of flexure hinges, multibody dynamic equations are established according to spatial motions of rigid bodies by using Lagrangian method. The shear effects and the torsional compliances of the commonly used circular flexure hinges are considered to enhance the modeling accuracy. The accuracies of various out-of-plane compliance formulas are also discussed. To verify the developed dynamic model, the finite element analyses (FEA) by using ANSYS and modal hammer experimental tests of the primary flexure-based composition structures and the integral 5-DOF stage are performed. The analytical modal frequencies are well in agreement with FEA and experimental test. The results are significant to analyze and optimize the 5-DOF flexure-based nanopositioning stage. |
url |
http://dx.doi.org/10.1155/2019/8501583 |
work_keys_str_mv |
AT yipingshen dynamicanalysisofa5dofflexurebasednanopositioningstage AT xinluo dynamicanalysisofa5dofflexurebasednanopositioningstage AT songlaiwang dynamicanalysisofa5dofflexurebasednanopositioningstage AT xuejunli dynamicanalysisofa5dofflexurebasednanopositioningstage |
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1725207653922111488 |