Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage
A multibody dynamic model is developed for dynamic analysis of a 5-DOF flexure-based nanopositioning stage in the projection optical system of the semiconductor lithography in this paper. The 5-DOF stage is considered as an assembly of rigid bodies interconnected by elastic flexure hinges. Consideri...
Main Authors: | Yiping Shen, Xin Luo, Songlai Wang, Xuejun Li |
---|---|
Format: | Article |
Language: | English |
Published: |
Hindawi Limited
2019-01-01
|
Series: | Mathematical Problems in Engineering |
Online Access: | http://dx.doi.org/10.1155/2019/8501583 |
Similar Items
-
Flexure-based nanopositioning systems : integrated design and control
by: Shilpiekandula, Vijay, 1979-
Published: (2010) -
Calibration of Nanopositioning Stages
by: Ning Tan, et al.
Published: (2015-12-01) -
Design, fabrication and mechanical optimization of a flexural high speed nanopositioning imaging stage
by: Panas, Robert M. (Robert Matthew)
Published: (2010) -
Development of a XYθz 3-DOF nanopositioning stage with linear displacement amplification device
by: Chu Chih-Liang, et al.
Published: (2017-01-01) -
A Novel Stick-Slip Nanopositioning Stage Integrated with a Flexure Hinge-Based Friction Force Adjusting Structure
by: Junhui Zhu, et al.
Published: (2020-08-01)