Characteristics of Bilayer Molybdenum Films Deposited Using RF Sputtering for Back Contact of Thin Film Solar Cells

Mo films prepared under a single deposition condition seldom simultaneously obtain a low resistivity and a good adhesion necessary for use in solar cells. In order to surmount the obstacle, bilayer Mo films using DC sputtering at a higher working pressure and a lower working pressure have been attem...

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Bibliographic Details
Main Authors: Sea-Fue Wang, Hsiao-Ching Yang, Chien-Fong Liu, Huy-Yun Y. Bor
Format: Article
Language:English
Published: Hindawi Limited 2014-01-01
Series:Advances in Materials Science and Engineering
Online Access:http://dx.doi.org/10.1155/2014/531401