The Meaning and Measure of Vertical Resolution in Optical Surface Topography Measurement
Vertical resolution is the most widely quoted and most frequently misunderstood performance specification for equipment that measures surface topography. Here I propose to use internationally standardized terms and definitions for measurement noise and surface topography repeatability as more meanin...
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| Format: | Article |
| Language: | English |
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MDPI AG
2017-01-01
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| Series: | Applied Sciences |
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| Online Access: | http://www.mdpi.com/2076-3417/7/1/54 |