An Analysis of a Compact Label-Free Guiding-Wave Biosensor Based on a Semiconductor-Clad Dielectric Strip Waveguide
In this paper, a compact, integrated, semiconductor-clad strip waveguide label-free biosensor is proposed and analyzed. The device is based on CMOS-compatible materials such as amorphous-Si and silicon oxynitride. The optical sensor performance has been modeled by a three-dimensional beam propagatio...
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Format: | Article |
Language: | English |
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MDPI AG
2020-06-01
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Series: | Sensors |
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Online Access: | https://www.mdpi.com/1424-8220/20/12/3368 |