PDMS-PDMS Micro Channels Filled with Phase-Change Material for Chip Cooling

PDMS-PDMS Micro Channels Filled with Phase-Change Material for Chip Cooling

This paper reports on a chip cooling solution using polydimethylsiloxane (PDMS) based microfluidic devices filled with n-Octadecane. A thick SU-8 layer of 150 µm is used as the master mold for patterning PDMS fabrication. With the SU-8 mold, patterns with straight lines at microscale have been fabri...

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Bibliographic Details
Main Authors: Zong Liu, Siyin Qin, Xingwei Chen, Dazhu Chen, Fei Wang
Format: Article
Language:English
Published: MDPI AG 2018-04-01
Series:Micromachines
Subjects:
MEMS
polymer
micro-channel device
phase-change material
chip cooling
thermal management
flexible electronics
Online Access:http://www.mdpi.com/2072-666X/9/4/165

Internet

http://www.mdpi.com/2072-666X/9/4/165

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