MEMS-Based Wavelength-Selective Bolometers

MEMS-Based Wavelength-Selective Bolometers

We propose and experimentally demonstrate a compact design for membrane-supported wavelength-selective infrared (IR) bolometers. The proposed bolometer device is composed of wavelength-selective absorbers functioning as the efficient spectroscopic IR light-to-heat transducers that make the amorphous...

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Bibliographic Details
Main Authors: Thang Duy Dao, Anh Tung Doan, Satoshi Ishii, Takahiro Yokoyama, Handegård Sele Ørjan, Dang Hai Ngo, Tomoko Ohki, Akihiko Ohi, Yoshiki Wada, Chisato Niikura, Shinsuke Miyajima, Toshihide Nabatame, Tadaaki Nagao
Format: Article
Language:English
Published: MDPI AG 2019-06-01
Series:Micromachines
Subjects:
wavelength-selective sensors
infrared sensors
perfect absorbers
amorphous silicon
bolometers
microelectromechanical systems (MEMS)
Online Access:https://www.mdpi.com/2072-666X/10/6/416

Internet

https://www.mdpi.com/2072-666X/10/6/416

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