Hydrogen concentration at a-Si:H/c-Si heterointerfaces—The impact of deposition temperature on passivation performance

We studied the effect of deposition temperature on the hydrogen distribution and the passivation performance of hydrogenated amorphous silicon (a-Si:H) coated crystalline silicon (c-Si) heterojunctions as a model of high efficiency solar cell structures. Nuclear reaction analysis (NRA) was employed...

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Bibliographic Details
Main Authors: Kazuhiro Gotoh, Markus Wilde, Shinya Kato, Shohei Ogura, Yasuyoshi Kurokawa, Katsuyuki Fukutani, Noritaka Usami
Format: Article
Language:English
Published: AIP Publishing LLC 2019-07-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5100086