Nitrogen as a carrier gas for regime control in focused electron beam induced deposition
This work reports on focused electron beam induced deposition (FEBID) using a custom built gas injection system (GIS) equipped with nitrogen as a gas carrier. We have deposited cobalt from Co2(CO)8, which is usually achieved by a heated GIS. In contrast to a heated GIS, our strategy allows avoiding...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
De Gruyter
2014-01-01
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Series: | Nanofabrication |
Subjects: | |
Online Access: | http://www.degruyter.com/view/j/nanofab.2014.1.issue-1/nanofab-2014-0002/nanofab-2014-0002.xml?format=INT |