Nitrogen as a carrier gas for regime control in focused electron beam induced deposition

Nitrogen as a carrier gas for regime control in focused electron beam induced deposition

This work reports on focused electron beam induced deposition (FEBID) using a custom built gas injection system (GIS) equipped with nitrogen as a gas carrier. We have deposited cobalt from Co2(CO)8, which is usually achieved by a heated GIS. In contrast to a heated GIS, our strategy allows avoiding...

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Bibliographic Details
Main Authors: Wachter Stefan, Gavagnin Marco, Wanzenboeck Heinz D., Shawrav Mostafa M., Belić Domagoj, Bertagnolli Emmerich
Format: Article
Language:English
Published: De Gruyter 2014-01-01
Series:Nanofabrication
Subjects:
FEBID
carrier gas
cobalt
dicobalt octacarbonyl
gas injection system
GIS
SEM
nitrogen
electron limited regime
precursor limited regime
Online Access:http://www.degruyter.com/view/j/nanofab.2014.1.issue-1/nanofab-2014-0002/nanofab-2014-0002.xml?format=INT

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http://www.degruyter.com/view/j/nanofab.2014.1.issue-1/nanofab-2014-0002/nanofab-2014-0002.xml?format=INT

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